Bpure Series Tube & Boat Cleaning Tool

 Bpure TC2000A

Bpure TC2000A

System Overview
The Bpure series of quartz tube & boat cleaning tools provides customized cleaning (immersion or spray) of critical diffusion furnace components.

 Bpure TC3000A

Bpure TC3000A

Applicable Parts:
Applicable Materials:
Technology Markets:

200 mm and 300 mm Tubes and Boats
Quartz, SiC
Analog IC, Digital IC, Power IC, MEMS, Advanced Packaging

Processes
  • Cleaning of quartz tubes, quartz/SiC boats
  • Can also be used to clean other quartz materials, such as pedestals, caps, torches, quartz plates, ignition guns, heat preservation barrels, etc.
Production Advantages
  • Fully-automated process control
  • Enclosed design to improve working environment and guarantee operators’ safety
  • High stability, uptime ≥99%, lower maintenance costs
  • Recipe editor is flexible and convenient, support parallel jobs
  • Suitable for a variety of sizes of parts cleaning