Bpure Series Tube & Boat Cleaning Tool
The Bpure series of quartz tube & boat cleaning tools provides customized cleaning (immersion or spray) of critical diffusion furnace components.
200 mm and 300 mm Tubes and Boats
Analog IC, Digital IC, Power IC, MEMS, Advanced Packaging
- Cleaning of quartz tubes, quartz/SiC boats
- Can also be used to clean other quartz materials, such as pedestals, caps, torches, quartz plates, ignition guns, heat preservation barrels, etc.
- Fully-automated process control
- Enclosed design to improve working environment and guarantee operators’ safety
- High stability, uptime ≥99%, lower maintenance costs
- Recipe editor is flexible and convenient, support parallel jobs
- Suitable for a variety of sizes of parts cleaning