Bpure Series Tube & Boat Cleaning Tool
Bpure TC2000A
System Overview
Bpure series of quartz tube & boat cleaning tools provides customized cleaning (immersion or spray) of critical diffusion furnace components.
Bpure TC3000A
Applicable Parts:
Applicable Materials:
Technology Markets:
200 mm and 300 mm Tubes and Boats
Quartz, SiC
Analog IC, Digital IC, Power IC, MEMS, Advanced Packaging
Processes
- Cleaning of quartz tubes, quartz/SiC boats
- Can also be used to clean other quartz materials, such as pedestals, caps, torches, quartz plates, ignition guns, heat preservation barrels, etc.
Production Advantages
- Fully-automated process control
- Enclosed design to improve working environment and effectively guarantee operators’ safety
- High stability, uptime ≥99%, lower maintenance costs
- Recipe editor is flexible and convenient, support parallel jobs
- Suitable for a variety of sizes of parts cleaning
Akrion Technologies can also provide customized parts cleaners, ovens, and stockers