CVD for Power IC Technology

APS180G Plus SiC Crystal Growth Furnace

The APS180G Plus SiC crystal growth furnace uses the physical vapor transport (PVT) method for growing either 4” or 6” SiC ingots. The APS180G Plus offers precise temperature and vacuum control to optimize crystal growth using the highest purity components along with flexible software to minimize crystal defects and contamination of the SiC ingot.