Allentown, PA. May 17, 2021—A longstanding Akrion Technologies customer has purchased additional GAMA wet stations as part of a MEMS expansion. These modular GAMA wet stations incorporate the latest technological advances for process control and wafer drying, resulting in high device yield and low cost of ownership (COO).  The European MEMS customer will be performing several critical etch steps with the new GAMA wet stations.

“This is a great opportunity for us to demonstrate the quality and performance of our GAMA tools which are always improving to adapt to the latest technologies in the industry.  We are excited that our customers value our knowledge and experience. These tools will be used for uniform Si etch for high aspect ratio devices that require critical cleaning and drying,” explains Dr. Ismail Kashkoush, CTO & GM New Product / New Market Development BU.

About Akrion Technologies Inc.

Located in Allentown, Pennsylvania, Akrion Technologies is a leading supplier of advanced surface preparation systems and processes used in the manufacture of microelectronic substrates and devices.  Since its inception, the company has offered wet cleaning/etching benches used in numerous steps during semiconductor manufacturing to remove particle contamination from the surface of the silicon wafers on such products as prime/reclaim wafers, MEMS, flat panel displays, logic devices, analog devices, photovoltaic/solar cells, and memory.

Akrion Technologies is now able to offer a more extensive portfolio of process solutions to microelectronic device manufacturers to include PVD, CVD, PECVD, plasma etching, annealing/oxidation/diffusion furnaces along with off-line failure analysis etching and tube/boat/parts cleaning.