Advanced Process Control of Chemical Concentration for Solar Cell Manufacturing

Advanced Process Control of Chemical Concentration for Solar Cell Manufacturing

Solar cell manufacturing requires many wet cleaning steps. Texturization is one of these steps. As a method for light trapping, the texturization step is very critical to assure high efficiency for cells based on both mono-crystalline and multi-crystalline silicon. In order to obtain stable and reproducible manufacturing processes, a reliable and accurate real-time measurement of the etching constituents becomes necessary.

Advanced Chemical Concentration Control for Fabrication of Devices Using SiC

Advanced Chemical Concentration Control for Fabrication of Devices Using SiC

In conventional MEMS fabrication, relatively inert compounds such as Si3N4 are used as an etch stop or mask for creating patterns on wafers. However, materials such as this require insight as to their etch selectivity corresponding to that of the substrate material and are not suitable for high temperature devices.