How to Overcome the Effects of Silicon Build-Up During Solar Cell Wet Chemical Processing

How to Overcome the Effects of Silicon Build-Up During Solar Cell Wet Chemical Processing

Although the chemical reaction is well known, the anisotropic etching of Si in alkaline solutions is a complex process. This is particularly true in the solar industry where a large mass of silicon is typically introduced into the etch bath. The etch by-products (silicates) affect the balance of the etching specie. If adequate compensation is not made for these by- products, a significant drop in etch rate and an increase in contamination levels is typically noticed. Because of this contamination, production lines would suffer from unpredictable wafer characteristics and hence lower cell performance.

Advanced Chemical Concentration Control for Fabrication of Devices Using SiC

Advanced Chemical Concentration Control for Fabrication of Devices Using SiC

In conventional MEMS fabrication, relatively inert compounds such as Si3N4 are used as an etch stop or mask for creating patterns on wafers. However, materials such as this require insight as to their etch selectivity corresponding to that of the substrate material and are not suitable for high temperature devices.