In this study, we highlight the effect of pre-cleans, texturization and final cleans on cell parameters. We also studied the importance of coupling these wet cleaning and texturization steps with the PECVD steps to achieve the film quality required for highest solar cell efficiency.
Archive for tag: texturization
The continuously increasing integration of today’s most advanced solar cells requires increasingly tight process control of the cell fabrication. Although numerous studies have been performed to analyze the mechanisms and kinetics of these processes, little attention, if any, has been given to monitoring and controlling the chemical concentrations in the process baths.
Solar cell manufacturing requires many wet cleaning steps. Texturization is one of these steps. As a method for light trapping, the texturization step is very critical to assure high efficiency for cells based on both mono-crystalline and multi-crystalline silicon. In order to obtain stable and reproducible manufacturing processes, a reliable and accurate real-time measurement of the etching constituents becomes necessary.