System Overview
Designed for the most cutting-edge devices. The fully automated Pinnacle System with its carrierless design; utilizes the most advanced wafer handling and process control subsystems to ensure the optimum process results for manufacturers of digital integrated circuits.

Production Advantages

• Superior particle and metal performance

• Eliminates carrier-based defects—no shadowing or contact marks

• Rack and pinion style robot with absolute motor rotation encoding for precise positioning

• Single point facilities connection for water, nitrogen, and CDA

• Multi-tank plenum and modular compact design

• Real-time tracking of chemicals, water, and gases

• Wafer Transfer System provides clean and dirty path (Pinnacle 300)