System Overview
The Bcube series of wet cleaning and etching equipment provides excellent process results for manufacturing MEMS, LEDs, and power semiconductors. Systems are available for a variety of substrate materials including Si, SiC, Germanium, Aluminum oxide and III-IV compound semiconductors.

Production Advantages

• Automated and manual wet station models are available

• Processes substrates of various materials and sizes

• Integrates advanced drying technologies such as Marangoni, IPA, and spin dryers

• Flexible process recipes

• Automatic management of job history and data logs

• Automatic scheduling of cleaning processes with multi-tasking for enhanced throughput

• Advanced ultrasonic and megasonic modules for optimized cleaning

• Flexible chemical delivery