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Bpure Series Tube & Boat Cleaning Tool
System Overview
The Bpure series of quartz tube & boat cleaning tools provides customized cleaning (immersion or spray) of critical diffusion furnace components.
Bpure TC2000A
Applicable Parts:
Application Material:
Technology Markets:
Bpure TC3000A
200 mm and 300 mm Tubes and Boats
Quartz, SiC
Analog IC, Digital IC, Power IC, MEMS, Advanced Packaging
Production Advantages
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Fully-automated process control
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Enclosed design to improve working environment and guarantee operators’ safety
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High stability, uptime ≥99%, lower maintenance costs
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Recipe editor is flexible and convenient, support parallel jobs
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Suitable for a variety of sizes of parts cleaning
Processes
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Cleaning of quartz tubes, quartz/SiC boats
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Can also be used to clean other quartz materials, such as pedestals, caps, torches, quartz plates, ignition guns, heat preservation barrels, etc.
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